US8389355B2 - Semiconductor integrated circuit device having MIM capacitor and method of fabricating the same - Google Patents
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Pinpoint Leakage Current Point of MIM Capacitor in Five Steps - iST - Pinpoint Leakage Current Point of MIM Capacitor in Five Steps
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Pinpoint Leakage Current Point of MIM Capacitor in Five Steps - iST - Pinpoint Leakage Current Point of MIM Capacitor in Five Steps
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